| Parameter | Specification |
|---|---|
| Internal Dimensions | Φ400 * D500mm (Φ: Diameter, D: Depth) |
| External Dimensions | Approx. W850 * H1650 * D1490mm |
| Temperature Range | 105℃ ~143℃ |
| Humidity Range | 75% R.H. ~ 100% R.H |
| Pressure Range | 1.2 ~ 2.89 kg/cm² (including 1 atm) |
| Heating Time | RT → 132℃ / 85% R.H. in approx. 50 min |
| Temperature Fluctuation | ±0.5℃ |
| Temperature Uniformity | ±2℃ |
| Humidity Fluctuation | ±3% R.H. |
| Humidity Uniformity | ±5% R.H. |
| Conforms to Standards | JESDEC-A110, IEC 60068-2-66-1994, etc. |